Influence of fabrication parameter on the nanostructure of SiNWs under HF/AgNO3/Fe (NO3)3 etching sy

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  Large-area SiNWs has been successfully fabricated through one-step metal-assisted chemical etching process at room temperature.The effects of key fabrication parameters (AgNO3 concentration, Fe (NO3)3 concentration, and etching time) on the nanostructure SiNWs were carefully investigated by SEM, TEM, respectively.
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