提出了一种新的工艺方法制备硅基电容式微传声器 .用氧化多孔硅作牺牲层制备空气隙 ,用约 15μm厚的浓硼掺杂硅作为微传声器的刚性背极板 .采用该方法制备的微传声器 ,在 50 0 Hz至 11k Hz的工作频率下 ,灵敏度范围为 -55d B(1.78m V/Pa)到 -4 5d B(5.6m V/Pa) ,随着频率的升高 ,灵敏度呈上升趋势 ,截止频率超过 2 0 k Hz A new method of preparing silicon-based condenser microphones was proposed.The air gap was made by using sacrificial layer of oxidized porous silicon and the silicon was used as the rigid backplate of the microphones with concentrated boron about 15μm thick.Using this method Micro-microphones have a sensitivity range of -55d B (1.78m V / Pa) to -45d B (5.6m V / Pa) at an operating frequency of 50 0 Hz to 11k Hz, with sensitivity as a function of frequency The upward trend, the cut-off frequency exceeds 20 k Hz