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金刚石薄膜是一种性能优异的功能薄膜,比颗粒状金刚石材料有着更为广泛的应用领域,尤其是在光学和微电子学方面,因此近年来受到极大的关注。然而,在气相沉积金刚石薄膜中,金刚石在光滑非金刚石衬底表面难以成核。为了提高金刚石在光滑衬底上的成核密度,一般需要破坏衬底表面,使之布满宏观缺陷,如划痕、蚀坑等以提供成核点,或在衬底表面预沉积有助于金刚石成核的过渡层如DLC,β-SiC等。因此,寻找增强金刚石在光滑非金刚石衬底上成核的有效方法一直是近年来气相沉积金刚石研究的重要内容。最近,Meilunas等人发现Fuller烯中的C_(60),C_(70)作为过渡层可以显著提高金刚石在光滑Si衬底表面的成核密度。由于Fuller烯是一种新型的光学和半导体材料,因此,研究Fuller烯表面气相生长金刚石薄膜不仅为增强光滑衬底表面上的成核提供了一种新方法,更为重要的是有可能为金刚石薄膜和Fuller烯提供新的应用领域。
Diamond film is a kind of high performance functional film. It has more extensive applications than granular diamond materials, especially in the fields of optics and microelectronics. Therefore, it has received great attention in recent years. However, in vapor-deposited diamond films, diamond is difficult to nucleate on a smooth, non-diamond substrate surface. In order to increase the diamond nucleation density on a smooth substrate, it is generally necessary to destroy the substrate surface so that it is covered with macroscopic defects such as scratches, etch pits, etc. to provide nucleation sites or to pre-deposit on the substrate surface Diamond nucleation of the transition layer such as DLC, β-SiC and so on. Therefore, looking for an effective method to enhance the nucleation of diamond on a smooth non-diamond substrate has been an important part of the research of vapor deposition diamond in recent years. Recently, Meilunas et al. Found that C_ (60) and C_ (70) in Fuller ene as transition layer can significantly increase the nucleation density of diamond on the surface of smooth Si substrate. Since Fullerene is a new type of optical and semiconducting material, studying Fuller’s surface vapor grown diamond films not only provides a new way to enhance nucleation on a smooth substrate surface, but more importantly, it is possible to diamond Films and Fullerenes offer new areas of application.