Three Beam Interfering Pressure Gauge^①

来源 :半导体光子学与技术：英文版 | 被引量 : 0次 | 上传用户：fogstorm

【摘要】

：

In order to solve the problem of high precision,complete electric insulating detection of the pressure measuring system,we have developed the three-beam interfe

【作者】

：

WUZhaoxia TANGXuhui 等

【机构】

：

YanshanUniversity

【出处】

：

半导体光子学与技术：英文版

【发表日期】

：

1997年1期

【关键词】

：

压力计光检测计三射线妨碍光路差异 Keywords: Fourier Transformation Gauge Optical Path Differ

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In order to solve the problem of high precision,complete electric insulating detection of the pressure measuring system,we have developed the three-beam interferometer.In this paper,the operation principle,structure of the system and measuring results are

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Three Beam Interfering Pressure Gauge^①

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