针对表层材料硬度检测中常用的几种显微硬度仪以及近年来发展的纳米压痕技术 ,对比分析了各种硬度仪的特点及其使用范围 ,着重指出了显微硬度仪与纳米压痕仪的定义在物理本质上的差别。最后针对最常用的维氏显微硬度仪与目前先进的纳米压痕技术 ,利用有限元数值模拟并结合纳米压痕实验数据 ,给出了两种硬度值在数量上的关系 According to several kinds of microhardness tester commonly used in surface hardness testing and the nanoindentation technology developed in recent years, the characteristics and the using range of each kind of hardness tester are comparatively analyzed, and the microhardness tester and nano indenter The definition of physical differences in the physical. Finally, according to the most commonly used Vickers microhardness tester and the current advanced nanoindentation technology, the numerical relationship between the two kinds of hardness values ​​is given by using the finite element numerical simulation and the nanoindentation experimental data