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库尔特原理是微粒检测的一种标准技术,而微纳尺度微孔的制造是库尔特原理的关键部分.本文采用聚焦离子束(FIB)技术进行固态微孔的加工,并自行设计搭建基于FPGA的测试平台对加工出的微孔进行检测.测试结果表明:采用该技术加工的固态微孔能够产生基准电流信号,但是基准信号会随时间变化,且随着输入电压的变化呈非线性变化.
Kurt’s principle is a standard technique for particle detection, and the fabrication of micro-nano-scale micro-pores is a key part of Kurt’s principle.In this paper, FIB technology is used to process solid micro-pores and to design and construct FPGA-based test platform to detect the processing of micro-holes.The test results show that: the solid-state micro-holes processed using this technology can produce a reference current signal, but the reference signal will change over time, and with the input voltage is nonlinear Variety.