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采用固体Nd:YAG激光器对离子镀TiN薄膜进行织构化处理,表征了薄膜的结构、形貌及凹坑织构参数.通过UMT-2往复式球-盘摩擦磨损试验机评价了织构化薄膜的摩擦磨损特性,研究了织构形貌对TiN薄膜干摩擦条件下摩擦磨损性能的影响.研究结果表明:与未织构化的TiN薄膜相比,织构化TiN薄膜的平均摩擦系数降低,并且磨损率明显减小,这说明织构化TiN薄膜具有更好的耐磨损性能.摩擦过程中,凹坑织构既捕获了磨屑,又有利于摩擦过程中阶跃运动的发生,易于将磨屑带出磨痕,从而降低了摩擦磨损.
TiN thin films were treated by solid-state Nd: YAG laser to characterize the structure, morphology and pit texture parameters of the ion-plating TiN films.The texture of the films was evaluated by UMT-2 reciprocating ball-disk friction and wear tester The friction and wear properties of TiN thin films were investigated and the effects of texture morphology on the tribological properties of TiN thin films were investigated.The results show that the average friction coefficient of textured TiN films is lower than that of un-textured TiN films , And the wear rate was significantly reduced, which shows that the textured TiN film has better wear resistance.In the friction process, the dimpled texture not only captures the wear debris but also facilitates the step motion in the friction process, Easy to wear debris out of wear marks, thereby reducing the friction and wear.