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利用SEM/EDS(扫描电镜/电子能谱)、XPS(X射线光电子能谱)结合机械截面样品制备方法,对Al_2O_3陶瓷金属化后表面出现的“红点”进行研究。利用SEM对陶瓷“红点”区域的形貌进行分析,利用XPS、EDS对表面元素成分及价态进行分析,利用SEM/EDS、结合机械截面样品制备方法对杂质元素的深度分布进行分析。结果表明红点区域有明显结构缺陷,致色元素主要为Cr~(3+)。此外,还探讨了氧化铝陶瓷表面红点的显色机理。最后,通过模拟实验研究了一些工艺环节对杂质引入的影响。
The “red dot” appearing on the surface of Al 2 O 3 ceramics after metallization was studied by SEM / EDS (X-ray photoelectron spectroscopy) and XPS (X-ray photoelectron spectroscopy) The morphology of the ceramic “red dot” region was analyzed by SEM. The elemental composition and valence of the surface were analyzed by XPS and EDS. The depth distribution of impurity elements was analyzed by SEM / EDS and mechanical cross-section sample preparation . The results showed that the red dot area has obvious structural defects, the main color element is Cr ~ (3 +). In addition, the mechanism of red color on the surface of alumina ceramic was also discussed. Finally, the impact of some process steps on impurity introduction has been studied through simulation experiments.