论文部分内容阅读
详细介绍了双框架结构的硅微型机械振动陀螺的工作原理及工艺，设计并试制出了挠性轴厚度为０．８μｍ的三种不同尺寸的双框架结构的硅微型机械振动陀螺的样品，其机械结构的主要尺寸误差可控制在１０％以内。
The working principle and technology of the double-frame silicon micro-mechanical vibrating gyroscope are introduced in detail. Three samples of silicon micro-mechanical vibrating gyroscope with double-frame structure with flexible shaft thickness of 0.8μm are designed and manufactured. The main dimensions of mechanical structure error can be controlled within 10%.