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A high temperature displacement sensor based on the principle of eddy-current is investi-gated. A new temperature compensation technique by using eddy-current effect is presented to satisfythe special requirement at high temperature up to 550 °C. The experiment shows that the temperaturecompensation technique leads to good temperature stability for the sensors. The variation of the sen-sitivity as well as the temperature drift of the sensor with temperature compensation technique is onlyabout 7.4% and 90~350 mV at 550 °C compared with that at room temperature, and that of the sensorwithout temperature compensation technique is about 31.2% and 2~3 V at 550 °C compared with thatat room temperature. A new dynamic calibration method for the eddy-current displacement sensor ispresented, which is very easy to be realized especially in high frequency and at high temperatures.The high temperature displacement sensors developed are successfully used at temperature up to550 °C in a magnetic bearing system for more than 100 h.
A high temperature displacement sensor based on the principle of eddy-current is investi-gated. A new temperature compensation technique by using eddy-current effect is presented to satisfy the special requirement at high temperature up to 550 ° C. The experiment shows that the temperature compensation technique leads to good temperature stability for the sensors. The variation of the sensitivity-well as the temperature drift of the sensor with temperature compensation technique is onlyabout 7.4% and 90-350 mV at 550 ° C compared with that at room temperature, and that of the sensor with out temperature compensation technique is about 31.2% and 2 ~ 3 V at 550 ° C compared with that at room temperature. A new dynamic calibration method for the eddy-current displacement sensor ispresented, which is very easy to be realized especially in high frequency and at high temperatures. high temperature displacement sensor developed are successfully used at temperature up to 550 ° c in a magnetic bearing system for more than 100 h.