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为了提高多电极静电拉伸薄膜反射镜的面形精度,基于Henky-Campbell圆薄膜平衡方程分析了薄膜均布载荷作用下的拉伸成形和面形误差。采用ANSYS软件一阶优化法,建立了以薄膜屈服强度为状态变量,镜面3个同心环形区域上施加的载荷为设计变量,以反射镜面形与理想面形的最小均方根误差(RMS)为目标的优化模型,对口径300 mm、中心挠度分别为0.5、1.0和1.5 mm的薄膜反射镜面形进行了优化。实验中优化后的最佳镜面面形RMS为7.73μm,PV值为50.69μm,较优化前分别减少了30.2%和23.7%。
In order to improve the surface accuracy of multi-electrode electrostatic stretch film reflectors, the tensile forming and surface profile errors under uniform film loading were analyzed based on the Henky-Campbell circle film equilibrium equation. The first order optimization method of ANSYS software was used to set the yield strength of the film as the state variable and the load applied on the three concentric annular areas of the mirror as the design variables. The minimum root mean square error (RMS) of the mirror surface shape and the ideal surface area was The optimized model of the target is optimized for thin-film mirrors with a diameter of 300 mm and center deflections of 0.5, 1.0 and 1.5 mm respectively. The optimized optimized mirror surface RMS was 7.73μm and the PV value was 50.69μm, which was reduced by 30.2% and 23.7% respectively compared with that before optimization.