CCD芯片的量子效率表示在曝光时间内到达像素光敏面的光子转换为电子的百分比,与器件的几何结构、材料等有关,是评价CCD芯片性能的最主要因素之一。通过一定的测量装置及相应的测量方法对CCD芯片的量子效率进行测量,才能对CCD芯片的成像性能做出客观评价。因此,根据欧洲机器视觉协会制定的EMVA1288标准设计了一套CCD芯片量子效率的测量装置,并且阐述了基于量子效率的测量方法,解决了单色光生成以及对于不同CCD测量时的兼容性问题。经过反复论证,该测量装置和方法具有通用性强、高精度和高稳定度等优点。 The quantum efficiency of a CCD chip represents the percentage of photons converted to electrons reaching the photosensitive surface of a pixel during exposure time, which is one of the most important factors in evaluating the performance of a CCD chip, as it relates to the device geometry, materials, and the like. The quantum efficiency of the CCD chip can be measured by a certain measuring device and the corresponding measuring method to make an objective evaluation on the imaging performance of the CCD chip. Therefore, a set of measurement device of quantum efficiency of CCD chip is designed according to EMVA1288 standard set by the European Machine Vision Association, and a measurement method based on quantum efficiency is described, which solves the problem of monochromatic light generation and compatibility with different CCD measurement. After repeated demonstration, the measuring device and method have the advantages of high universality, high precision and high stability.