瑞典Innovance公司多年来一直与世界上很多研究机构合作,设计和制造用于半导体外延以及特性分析的先进设备.其主要产品有液相外延(LPE)和金属有机物化学气相沉积(MOCVD)设备,室温霍尔效应计,深能级瞬态仪,工作于4K的低温高阻抗霍尔效应计,光致发光台及用于DDMR的装置.在此着重介绍MOCVD设备. Innovance of Sweden has for many years worked with many research institutes around the world to design and manufacture state-of-the-art equipment for semiconductor epitaxy and characterization. Its main products are liquid phase epitaxy (LPE) and metalorganic chemical vapor deposition (MOCVD) equipment, Hall Effect Meters, Deep Level Transient Meters, Low Temperature High Impedance Hall Effect Meters for 4K, Photoluminescent Lamps, and Devices for DDMR. This article focuses on MOCVD equipment.