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微悬臂梁传感技术是微纳传感技术研究的热点,仪器装置的研究也从单悬臂梁向微梁阵列的方向发展。本文针对间距为250μm的商品化微梁阵列,提出了一种实现对其弯曲变形的读出系统光路。利用高精度位移平台调节激光器空间位置,使光束实现微距离上平行,并分别照射在阵列梁的相邻微梁上。用位置敏感探测器对两个微悬臂梁尖端反射的激光信号进行检测,实现系统传感功能。实验验证该光路设计简单易行,针对这一方案实现了两个微梁的信号分离。在微梁上修饰对应的抗体,系统就可以对其抗原行检测。该方案对微梁多阵列传感器研制开发提出了一个新的思路。
Micro-cantilever sensing technology is a hotspot in the research of micro-nano-sensing technology, and the research on instrumentation also develops from single cantilever beam to micro-beam array. In this paper, a commercially available micro-beam array with a pitch of 250μm is proposed, and a readout system optical path for bending deformation is proposed. The use of high-precision displacement platform to adjust the position of the laser space, so that the light beam to achieve a parallel micro-distance, and were irradiated on the adjacent beam array beam. The position sensitive detector is used to detect the laser signals reflected by the two microcantilever tips to realize the system sensing function. Experimental verification of the optical design is simple and easy, for this program to achieve the two micro-beam signal separation. Modification of the corresponding antibody on the micro-beam, the system can detect their antigens. The program put forward a new idea for the research and development of micro-beam multi-array sensors.