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叙述了超高真空下熔断丝密封垫圈高、低温(高温区为310℃,低温区为-196℃)密封性能的研究方法.采用带电子倍增器的四极质谱计对密封系统进行了残余气体分析和微小漏孔检测.用以检验密封效果及其可靠性.通过多次实验研究,证明熔断丝密封垫圈不仅能经受300℃高温下的连续烘烤.而且能承受液氮温度下(-196℃)的“冷冲击”,垫圈密封性能良好,系统真空度达到2.7×10~(-8)帕。最后对这种密封垫圈温度变化过程中的密封机制作了理论分析,并给出了简要而实用的结论.
The research method of sealing performance of high and low temperature (310 ℃ in high temperature region and -196 ℃ in low temperature region) under high vacuum was described.The residual gas was used to seal the sealing system by using quadrupole mass spectrometer with electron multiplier Analysis and detection of small leaks to test the sealing effect and its reliability.Through several experimental studies have shown that the fuse can not only withstand continuous sealing at 300 ℃ high temperature baking and can withstand liquid nitrogen temperature (-196 ℃) of the “cold impact”, the gasket sealing performance is good, the system reached 2.7 × 10 ~ (-8) Pa vacuum. Finally, the sealing mechanism during the temperature change of the gasket was theoretically analyzed and a brief and practical conclusion was given.