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本文采用基体效应的多次迭代法对一些二元合金(FeNi28、FeNi36、NiCr20)和非晶材料(FeCrMoSiB_(14)、FeCrMoSiB_(17))的俄歇分析作了定量计算。对二元合金,平均相对偏差可以从修正前的8.37％提高到2.54％,对非晶材料,从修正前的16.86％提高到12.86％。后者的修正效果不太明显的原因在于选择了低能俄歇蜂,要受到表面残余碳污染层的影响。本文假定表面碳污染浓度Cc和碳污染层厚度Z之间有简单的线性关系:Z=A·Cc·a_c,a_c为碳的单原子层厚度,提出了一个简单的修正方法,结果可使非晶的平均相对偏差提高到8.26％。此外,本文讨论了谱峰取法对定量计算的影响,微分谱峰峰高法有着较大的不确定性。
In this paper, the Auger analysis of some binary alloys (FeNi28, FeNi36, NiCr20) and amorphous materials (FeCrMoSiB_ (14), FeCrMoSiB_ (17)) has been calculated by multiple iterations of matrix effect. For binary alloys, the average relative deviation can be increased from 8.37% before correction to 2.54% and from 16.86% before modification to 12.86% for amorphous alloys. The latter is not obvious because the low energy Aussie was chosen to be affected by the residual carbon contamination on the surface. This paper assumes that there is a simple linear relationship between the surface carbon pollution concentration Cc and carbon pollution thickness Z: Z = A · Cc · a_c, a_c is the carbon monolayer thickness, a simple correction method is proposed. As a result, The average relative deviation of the crystal increases to 8.26%. In addition, this paper discusses the influence of spectral peak extraction on quantitative calculation, and the differential peak-peak height method has great uncertainty.