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本文简要介绍同步辐射光的原理、特征,同步辐射光装置的构成及其开发现状,重点阐述同步辐射光在ULSI工业生产中的应用及其存在的课题。
This article briefly introduces the principle and characteristics of synchrotron radiation, the structure of synchrotron radiation device and its development status. The application of synchrotron radiation in industrial production of ULSI and its existing problems are emphatically described.