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描述了可在XUV光谱区获得消像散光谱的掠入射一维空间分辨光栅光谱仪的原理,特别是作为光谱仪前置集光及像散补偿的掠入射反射光学系统的特性,并给出了成像光谱仪的空间分辨能力的实测方法和测量结果,实验值与用光线追踪模拟的结果相符.文中还简述了该一维空间分辨光栅谱仪在激光等离子体诊断和互射线激光研究中的具体应用.
The principle of a grazing incidence 1D spatial resolution grating spectrometer which can obtain the astigmatic scattering spectrum in the XUV spectrum is described, especially as the characteristics of the pre-focused and astigmatic compensated grazing incidence and reflection optical system of the spectrometer, and the imaging The spatial resolution of the spectrometer was measured and measured, and the experimental results were in good agreement with the results of ray tracing simulations. The article also briefly describes the application of the one-dimensional spatial resolution grating spectrometer in laser plasma diagnosis and inter-ray laser research.