Preliminary Study on Pyrolysis of Polymethylsilsesquioxane by FT-IR and XPS

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Changes of composition and structure of various samples of polymethylsilsesquioxane (PMSQ) pyrolysed at different temperature under flowing nitrogen were investigated by means of FT-IR and X-ray photoelectron spectroscopy. Two temperature domains correspond to important changes in the chemical composition of PMSQ. The former (Tp 500oC) is associated with the organic-inorgnic transition.
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