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压电式微型合成射流器的结构参数对射流速度有极大影响,然而各结构参数的影响规律及程度无法用单因素考查法来确定。针对这个问题,采用正交分析法结合多域耦合数值模拟,研究了主要结构参数对射流速度的综合影响,对器件结构参数进行了优化。仿真结果表明:在所考查的参数范围内,喷口宽度、腔体宽度、压电片厚度对射流速度的影响较大,但三者的影响程度依次降低;射流速度随喷口宽度、压电片厚度的增大而减小,随腔体宽度的增大而增大;压电片宽度对射流速度影响很小。在此基础上,采用微机电系统(MEMS)加工工艺制作了压电式微型合成射流器,测得器件能承受的最大激励电压为30 V,最大射流速度为10 m/s,最佳工作频率为10 kHz。
The structural parameters of the piezoelectric miniature synthetic jet have a great influence on the jet velocity, however, the influence law and degree of each structural parameter can not be determined by the single factor test method. To solve this problem, orthogonal analysis method and numerical simulation of multi-domain coupling are used to study the influence of the main structural parameters on the jet velocity and to optimize the structural parameters of the device. The simulation results show that the influence of jet width, cavity width and piezoelectric film thickness on the jet velocity is larger than that of the jet flow rate in the range of parameters examined, Decreases with the increase of the width of the cavity, and the width of the piezoelectric film has little effect on the jet velocity. On this basis, a piezoelectric miniature synthetic jet was fabricated by micro-electromechanical system (MEMS) processing. The maximum excitation voltage that the device can withstand is 30 V and the maximum jet velocity is 10 m / s. The optimum operating frequency Is 10 kHz.