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对热驱动微型泵的关键部件——铝—硅复合膜片进行了数值计算和分析。发现存在一个合适的交变加热频率范围 ,使单位时间泵腔体积变化量达到最大 ;铝膜形状取为圆形比环形有利于得到更大的泵腔变形体积。减薄硅膜厚度和增加铝膜的厚度也能增大泵腔体积变化量
The key part of the heat-driven micro-pump - aluminum - silicon composite diaphragm were calculated and analyzed. It is found that there is a suitable alternating heating frequency range, which maximizes the volume change of the pump chamber per unit time. Taking the shape of the aluminum membrane as a circle is advantageous to obtain a larger deformation volume of the pump chamber. Thinning the thickness of the silicon film and increasing the thickness of the aluminum film can also increase the volume of the pump cavity