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提出了BCN三元化合物生长的简单模型.结果表明:元素的表面覆盖率、总体生长率、N元素的生长率和化合物中含N量由N流量与B和C流量和之比决定,且总体生长率存在最大值.在N流量与B和C流量和之比为定值时,B和C的流量比对此影响甚小,但B和C元素的生长率及它们在化合物中的含量则主要由B和C的流量比决定
A simple model of BCN ternary compound growth was proposed.The results showed that the surface coverage, total growth rate, N element growth rate and N content in the compound were determined by the ratio of N flux to B and C flux, The maximum growth rate exists at which the flow rates of B and C have little effect on the ratio of N to B and C. However, the growth rates of B and C and their contents in compounds are then Mainly by the B and C flow ratio decision