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X射线荧光光谱分析已是一种精度可达二千分之一的先进分析技术。要达到这样的精度,主要是要解决取样和试样制备方面的问题。尽管如此,对于含量变化很大的试样仍可获得非常精确的结果;试样经熔融后,用一条校准曲线可以分析范围广泛的各种氧化物。近年来在分析装置方面所取得的一系列进展将有助于提高解决某些特殊分析问题的能力。将会极大地提高轻元素分析性能的一系列侧窗管中,首屈一指的是侧窗钪靶管;多层技术的发展表明,为改善对轻元素和超轻元素的色散能力所进行的努力已大有希望;探测技术的改进主要是依靠对不同元素选用不同的探测器以及使用象气体闪烁正比探测器这样的高分辨率气体探测器来实现。在数据处理方面,由于采用理论α系数、联机基本参数计算或是两者相结合的基本参数法,也将表现出明显地改进。另外,可以自动地处理试样测量结果并把X射线荧光分析结果与来自其它分析方法的结果结合起来的实验室管理方法也会得到愈加广泛的应用。近几年来,能量色散光谱法在仪器方面(硬件方面)没有大的进展。分辨率约为400电子伏特、在室温下就可以使用的HgI_2探测器用于区分或鉴别试样可能是非常有效的办法。在能量色散这一领域中,已研究出一些特别有效的软件包,其中包括无标准试样分析用的软件包和涂层分析用的软件包。
X-ray fluorescence spectrometry is an advanced analytical technique with an accuracy of one in 2000. To achieve such precision, the main problem is to solve the sampling and sample preparation. In spite of this, very accurate results are still obtained for samples with widely varying contents; after the sample has been melted, a calibration curve can be used to analyze a wide range of oxides. A series of advances made in the analysis of devices in recent years will help improve the ability to solve certain special analytical problems. Amongst a series of side window tubes that will greatly improve the light elemental analysis performance are the screened side window tubes; the development of multilayer technologies shows that efforts to improve the dispersibility of light and ultra-light elements have been made Hopefully, improvements in detection technology will mainly rely on the use of different detectors for different elements and the use of high resolution gas detectors such as gas scintillation proportional detectors. In data processing, due to the use of theoretical α coefficients, the basic parameters of online calculation or a combination of the two basic parameters of law, will also show significant improvements. In addition, laboratory management methods that automatically process sample measurements and combine XRF results with results from other analytical methods are increasingly used. In recent years, energy dispersive spectroscopy in the instrument (hardware) no major progress. With a resolution of about 400 eV, a HgI 2 detector that can be used at room temperature can be a very effective method of distinguishing or identifying samples. In the field of energy dispersions, some particularly effective software packages have been developed, including software packages for non-standard sample analysis and software packages for coating analysis.