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泛。对于给定的分辨率来说。其焦深远比紫外大得多。IBM公司最早将此技术应用于Perkin-Elmer公司的扫描投影光刻机上;西德的Karlsuss也早已有市售的准分子激光接触/接近式光刻机。而最引人注目的就是GCA公司于1988年推出的第一台商品化准分子激光步进
pan. For a given resolution. Its focal depth is much larger than UV. IBM first applied this technology to a Perkin-Elmer scanning projection lithography machine; Karlsuss in West Germany also had commercially available excimer laser contact / proximity lithography machines. The most notable is GCA’s first commercially available excimer laser stepper introduced in 1988