通过对微加工静电超声传感器的动力学机制的深入研究发展了一个空气弹簧支撑的张力板模型 (tensile plate on air spring,简称为TDK模型 ) .该模型全面计及了气隙空气弹簧的刚度 ,膜片的弯曲刚度和平面张力这三个机械刚度及一个静电负刚度的影响 .根据这个模型通过适当选用传感器的几何结构 ,尺寸和材料 ,便可获得所需要的基频和带宽 ,从而为微加工超声传感器的研究和优化设计提供了一个可靠的理论基础 . An air spring-supported tensile plate on air spring (TDK model) was developed by further studying the dynamic mechanism of the micro-machined electrostatic ultrasonic sensor.The model fully accounts for the stiffness of the air-gap air spring, Diaphragm bending stiffness and plane tension of the three mechanical stiffness and an electrostatic negative stiffness according to this model through the appropriate choice of sensor geometry, size and material, you can get the required base frequency and bandwidth, so as to micro Processing ultrasonic sensor research and optimization design provides a reliable theoretical basis.