论文部分内容阅读
探讨了在线温度和提拉速度对溶胶 -凝胶法制备的 Si O2 光学膜光学性质的影响 ,考察了热处理温度对 Si O2 光学膜表面散射率的影响。结果表明 :用溶胶 -凝胶法制成的 Si O2 光学膜随着在线温度的升高 ,膜的厚度呈线性减少 ,减少的速度为 0 .0 9nm/℃ ;室温下 Si O2 光学膜膜厚随提拉速度呈指数增长 ,指数等于 0 .54;Si O2 光学膜表面散射率随热处理温度的升高而增大 ,且在 40 0℃左右有一个增大的突变点。
The effects of on-line temperature and pulling speed on the optical properties of Si O2 optical films prepared by sol-gel method were investigated. The effects of annealing temperature on the surface scattering of Si O2 optical films were investigated. The results show that with the increase of on-line temperature, the thickness of Si O2 optical film prepared by sol-gel method decreases linearly with a decreasing rate of 0.09 nm / ℃. The film thickness of Si O2 at room temperature The pulling speed increased exponentially with the index equal to 0.54. The surface scattering of Si O2 films increased with the increase of heat treatment temperature, and there was an increasing abrupt change point around 40 0 ℃.