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全国半导体设备和材料标准化技术委员会第七届微光刻技术交流会暨微光刻分技术委员会年会于2017年10月25—28日在嘉兴市召开,会议由嘉兴科民电子设备技术有限公司承办。来自全国半导体设备和材料标准化技术委员会微光刻分技术委员会的委员和国内外微光刻领域的专家及技术人员约160人参加了本次会议。会议承办方浙江中国科学院应用技术研究院陈秋荣院长致辞,欢迎来自国内外专家参加本
National Semiconductor Equipment and Materials Standardization Technical Committee seventh microlithography seminar and microlithography Technical Committee annual meeting in October 25-28, 2017 in Jiaxing City, Jiaxing Branch by the Electronic Equipment Technology Co., Ltd. Undertake. About 160 members from the National Committee of Micro-lithography Technical Committee of Semiconductor Equipment and Materials Standardization Technical Committee and domestic and foreign experts and technicians in the field of micro-lithography attended the conference. Conference organizer Zhejiang Academy of Sciences Institute of Applied Technology, Professor Chen Qiu Rong speech, welcome to participate in this book from domestic and foreign experts