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本文介绍了文献中尚未见报道的利用微波等离子体CVD系统制备YBaCuO超导薄膜的探索性研究结果。在不断调整各工艺参数的基础上,摸索到了生成主相为YBa_2Cu_3O_(7-(?))的较佳淀积条件,并且通过XRD和SEM等分析比较了SrTiO_3单晶、YSZ单晶和宝石作为衬底的淀积效果。
In this paper, the exploratory research on the preparation of YBaCuO superconducting thin films by microwave plasma CVD has not been reported yet. Based on the continuous adjustment of the process parameters, the better deposition conditions for the formation of YBa2Cu3O_ (7- (?)) Were found, and SrTiO_3 single crystals, YSZ single crystals and gems were compared by XRD and SEM analysis Substrate deposition effect.