声光调Q Nd:YAG激光二次谐波诱导金硅界面的化学反应

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本文用声光调Q Nd∶YAG激光二次谐波诱导了Au与P型Si(111)在界面上的化学反应.用X射线衍射仪法、X射线光电子能谱对界面生成物作了化学分析,并用金相显微镜和扫描电子显微镜观察了表面形貌,还用四探针法测量了电阻率变化.分析表明:Au与Si在界面上发生的化学反应,其生成物为金含量逐步变化的硅化物层,如Au7Si、Au5Si和Au3Si等.本文的结果对众所周知的只有一个最低共熔点(370℃)的Au-Si相图是一个补充,它说明了在瞬热和淬冷的条件下的生成物是金硅化物.而不是金硅混合物.
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