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The microstructure,mechanical,and tribological properties of the carbon nitride(CN_x) thin films with different nitrogen contents deposited on high-speed steel substrates by reactive magnetron sputtering were studied.CN_x films with nitrogen contents from 10.7 to 28.2 at.%had an amorphous structure composing of the carbon bonds of sp~2C-C,sp~2C-N,and sp~3C-N.The TiN inter-layer cause the adhesion of CN_x films enhancement.The more nitrogen concentration led to larger film hardness and friction coefficient against GCr15 steel balls,but the wear rates decreased.
The microstructure, mechanical, and tribological properties of the carbon nitride (CN_x) thin films with different nitrogen contents deposited on high-speed steel substrates by reactive magnetron sputtering were studied. CN_x films with nitrogen contents from 10.7 to 28.2 at.% Had an amorphous structure composing of the carbon bonds of sp ~ 2C-C, sp ~ 2C-N, and sp ~ 3C-N.The TiN inter-layer causes the adhesion of CN_x films enhancement. The more nitrogen concentration led to larger film hardness and friction coefficient against GCr15 steel balls, but the wear rates decreased.