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在制备薄膜改善微通道表面粗糙度和疏水性研究中发现,激光固化光斑的直径与微通道宽度的匹配十分重要。针对具有自主知识产权的微通道同轴气吹展技术和光预固化制备NOA61薄膜技术背景,提出了一种掩膜设计思路,即设计分析掩膜直径在微米级的,以孔中心为缩放原点自动调节孔径的激光微加工掩膜装置。这种装置可以根据微通道的不同宽度自动调节光圈半径,同时掩膜孔中心始终位于微通道中心线上,在设计分析和模拟实验之后,其结果所形成误差态势是一致的。这表明,设计方案可实现误差与半径比小于5%的“微米级以孔中心为缩放原点自动调节孔径的激光微加工掩膜装置”;使用成熟精密的成品平移移动和转动组件可以搭建运动误差内的掩膜装置,省略了在零部件加工和装配过程中制作单一掩膜时对误差的技术要求和控制,将促进面向微通道激光微加工技术的发展。
In the preparation of thin films to improve the surface roughness and hydrophobicity of microchannels, it was found that the matching of the diameter of the laser-cured spots to the width of the microchannels is very important. In view of the microchannel coaxial gas blowing technology with independent intellectual property rights and the background of NOA61 thin film technology prepared by photo-precuring, a mask design idea is proposed, that is to design and analyze the mask diameter in the micron level, with the center of the hole as the zooming origin Adjust the aperture laser micro-machining mask device. The device automatically adjusts the iris radius according to the different widths of the microchannels, and the center of the mask hole is always located on the centerline of the microchannel. After the design analysis and simulation experiments, the resulting error situation is consistent. This shows that the design can achieve a laser micromachining mask device with an error of less than 5% “micron-sized aperture adjustment centering on the aperture center”, and the use of sophisticated precision finished translational movement and rotation components Motion mask device within the error, eliminating the need for a single mask in the processing and assembly process components of the error of the technical requirements and control, will promote the development of micro-channel-oriented laser micro-machining technology.