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采用溶胶 凝胶法成功制备了三氧化钼 (MoO3)薄膜 .首先 ,以CH3COCH2 COCH3,MoO3,C6 H5CH3和HOCH2 CH2 OCH3为原料合成三氧化钼溶胶和凝胶 .凝胶的热重和差热分析 (TG DTA)显示三氧化钼的晶化出现在5 0 8℃附近的 14 0℃范围内 .其次 ,利用旋转涂布法在硅 (111)基片上通过 4 5 0℃退火处理制备了三氧化钼薄膜 .XRD和FTIR谱表明薄膜为α MoO3相 .SEM形貌像显示薄膜中晶粒分布均匀致密 ,在基片表面无择优取向 ;晶粒尺度范围在 0 .5～ 1μm之间 .
The molybdenum trioxide (MoO3) thin films were successfully prepared by sol-gel method.Firstly, the molybdenum trioxide sols and gels were synthesized from CH3COCH2COCH3, MoO3, C6H5CH3 and HOCH2 CH2 OCH3.The thermogravimetry and differential thermal analysis (TG DTA) showed that the molybdenum trioxide crystallized in the range of 140 ℃ near 580 ℃ .Thirdly, the oxide of silicon (111) was prepared by spin-coating on silicon (111) The results of XRD and FTIR show that the film is α MoO3 phase, and the SEM image shows that the crystal grains in the film are uniformly and densely distributed with no preferred orientation on the surface of the film. The grain size ranges from 0.5 to 1 μm.