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本文综述了激光组装技术在日本微电子和光电子工业中的应用及发展前景。目前日本已开发出各种激光器和材料加工技术 ,并已应用于电子和光电子器件制造业 ,以满足用户对高性能、轻量化、低能耗移动式数字消费电子产品、宽带光纤通信、低尾气排放效能的灵活控制的小汽车等领域的需求。本文重点阐述固体激光器作为多用途光源在组装具有小特征尺寸的灵敏无源和有源器件的先进微型装置中的应用 ,以及固体激光器用于电子和光电子器件材料加工领域的代表性应用 ,如液晶显示器缺陷的调修、功能组件微调、光电子器件光学特性的精调、高密度互连电路的打孔、非晶硅太阳能电池的激光加工以及电子元件的高精度激光焊接 (如光学模块、微型继电器和锂离子电池 )。最近高功率超短脉冲固体激光器领域的进展使激光加工能力迅速提高 ,如在滤光片精调中的应用
This article summarizes the application of laser assembly technology in Japan’s microelectronics and optoelectronics industry and its development prospects. At present, Japan has developed a variety of laser and material processing technology, and has been used in electronic and optoelectronic devices manufacturing industry to meet the user’s high-performance, lightweight, low-power mobile digital consumer electronics, broadband optical communications, The demand for performance in the field of flexible control of the car. This article focuses on the use of solid-state lasers as versatile light sources in the development of advanced miniature devices for the assembly of sensitive passive and active devices with small feature sizes and the use of solid-state lasers in the electronics and optoelectronic device materials applications such as liquid crystal Fine tuning of optical components of optoelectronic devices, drilling of high-density interconnection circuits, laser processing of amorphous silicon solar cells, and high-precision laser welding of electronic components such as optical modules, micro-relays And lithium-ion battery). Recent developments in the field of high power, ultrashort-pulse solid state lasers have led to rapid improvements in laser processing capabilities, such as the application of filter fine tuning