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本文利用直流三极偏压溅射法在刀具上沉积了碳化钛膜,用球坑仪测量了膜厚,并用HX-1000显微硬度计测量了膜的维氏硬度:实际试验表明,刀具的使用寿命提高了3~5倍。
In this paper, a direct current three-pole bias sputtering method was used to deposit a titanium carbide film on the tool. The film thickness was measured by a ball-pits instrument. The Vickers hardness of the film was measured by a HX-1000 micro hardness tester. Life increased by 3 to 5 times.