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研究了均热法化学气相渗透工艺过程中反应气体浓度、配比及流动对沉积物和复合材料性能的影响 ,提出了一种简单反应气体在线监控法。XRD分析结果表明 ,当H2 /MTS摩尔比在 2～ 5之间时 ,可沉积出纯净均匀的碳化硅基体 ;而H2 /MTS摩尔比小于 1时 ,沉积物中含有大量自由碳。SEM分析表明 ,甲基三氯硅烷的浓度对沉积速率和沉积深度影响很大 ,随着甲基三氯硅烷的浓度减小 ,沉积深度增大 ,但甲基三氯硅烷的浓度减小引起沉积速率下降 ,沉积周期延长。确保炉内反应气体流动畅通 ,可提高沉积的均匀性和沉积速率。
The effect of reaction gas concentration, ratio and flow on the properties of sediments and composites during the soaking process was studied. A simple on-line gas monitoring method was proposed. The results of XRD showed that pure and homogeneous silicon carbide matrix could be deposited when the mole ratio of H2 / MTS was between 2 and 5, while the H2 / MTS molar ratio was less than 1, the sediment contained a large amount of free carbon. SEM analysis showed that the concentration of methyltrichlorosilane greatly affected the deposition rate and deposition depth. As the concentration of methyltrichlorosilane decreased, the deposition depth increased, but the concentration of methyltrichlorosilane decreased to cause deposition The rate of decline, the deposition cycle extended. Ensure smooth flow of reactant gas in the furnace to improve deposition uniformity and deposition rate.