Influence of substrate metals on the crystal growth of AlN films

来源 :International Journal of Minerals Metallurgy and Materials | 被引量 : 0次 | 上传用户:resiaton
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
AlN films were deposited by reactive radio frequency (RF) sputtering on various bottom electrodes,such as Al,Ti,Mo,Au/Ti,and Pt/Ti.The effects of substrate metals on the orientation of AlN thin films were investigated.The results of X-ray diffraction,atomic force microscopy,and field emission scanning electron microscopy show that the orientation of AlN films depends on the kinds of substrate metals evidently.The differences of AlN films deposited on various metal electrodes are attributed to the differences in lattice mismatch and thermal expansion coefficient between the AlN material and substrate metals.The AlN film deposited on the Pt/Ti electrode reveals highly the c-axis orientation with well-textured columnar structure.The positive role of the Pt/Ti electrode in achieving the high-quality AlN films and high-performance film bulk acoustic resonator (FBAR) may be attributed to the smaller lattice mismatch as well as the similarity of thermal expansion coefficient between the deposited AlN material and the Pt/Ti electrode substrate. AlN films were deposited by reactive radio frequency (RF) sputtering on various bottom electrodes such as Al, Ti, Mo, Au / Ti, and Pt / Ti. These effects of substrate metals on the orientation of AlN thin films were investigated. results of X-ray diffraction, atomic force microscopy, and field emission scanning electron microscopy show that the orientation of AlN films depends on the kinds of substrate metals evidently. These differences of AlN films deposited on various metal electrodes are attributed to the differences in lattice mismatch and thermal expansion coefficient between the AlN material and substrate metals. AIN film deposited on the Pt / Ti electrode reveals highly the c-axis orientation with well-textured columnar structure. The positive role of the Pt / Ti electrode in achieving the high -quality AlN films and high-performance film bulk acoustic resonator (FBAR) may be attributed to the smaller lattice mismatch as well as the similarity of thermal expansion coefficient between the depos ited AlN material and the Pt / Ti electrode substrate.
其他文献
It was impossible to mint the inaugration coin gy shanxi province in the early years ofthe Republic of China. for it had not such a condition and ablity to do t
鸡西矿业集团公司张辰煤矿西三采区3
期刊
鞘膜积液临床多见,已往多采用手术方法治疗。我院近三年来,采用鞘膜囊内注射醋酸氢化可的松治疗,收到显著疗效。本组17例中,婴儿一例,余者年龄12~54岁。其中固有鞘膜积液10例
商自有市场竞争那一刻,市场就好比是江山,谋之者众!谋略一出,便是攻城拔寨。有攻则有守,江山之争变得艰苦,也好看。江山从城池开始,市场从区域起步,开发和管理区域市场,便成了市场这个
访问哥本哈根大学是我北欧教育考察行程中重要的计划,因为哥本哈根大学不仅是北欧最早的大学,也是哥本哈根精神的发祥地.
在神农架下的房县门古镇,张守彦和程传均两位新老县人大代表承上启下、不负众望的事迹,被两万选民广为传颂。 Under Shennongjia, Fanggu County Ancient Town, Zhang Shouy
目的 :建立利巴韦林葡萄糖注射液中利巴韦林的快速测定方法。 方法 :用紫外分光光度法直接测定利巴韦林葡萄糖注射液中利巴韦林的含量。 结果 :在 2 0 7nm处 ,以水为溶媒 ,利
由我院研制的“运动创伤中药电疗仪”于1990年5月10日在我院通过了国家体委、国家医药管理局联合组织的鉴定。该仪器的研制成功,为建立具有中国特色的运动创伤治疗体系迈出
脑功能轻微失调(MBD)是儿童行为障碍中较多见的一种临床综合症,且在学龄儿童中较常见。近年来,在我国已重视对这类儿童的教育和治疗。现将我科系统治疗的350例资料,分析如下
高速公路养护确定成本计划,实行成本控制,选定核算对象,最终完成成本目标,降低成本。 Expressway maintenance to determine the cost plan, the implementation of cost co