发生正常阴极溅射的条件首先要选用廉价的铝阴极材料。我们用国产99.99％高纯铝制作的氦氖管已经正常工作25000小时以上。阴极结构设计合理,才能保证整批氦氖管发生正常阴极溅射。激光管制造工艺特别关键,必须使整个铝阴极表面状况均匀一致,氧化适当,十分清洁。才不致出现局部的异常辉光放电。此外,还应保持激光管工作电流正常,不要过大。长时间正常溅射阴极表面的结构特点 The normal sputtering conditions occur first of all to use cheap aluminum cathode material. We use the domestic 99.99% high purity aluminum helium neon tubes have been working more than 25,000 hours. Cathode structure design is reasonable, in order to ensure that the entire batch of He-Ne tube normal cathode sputtering. Laser tube manufacturing process is particularly critical, the entire surface of the aluminum cathode must be uniform, properly oxidized, very clean. It will not appear part of the abnormal glow discharge. In addition, the laser tube should also maintain the normal operating current, not too large. Long-term normal sputtering cathode surface structure characteristics