论文部分内容阅读
本文叙述千兆赫声表面波(SAW)石英横向滤波器的制作权限和具体性能。首先研究了铝金属化石英上SAW超精细叉指换能器的制作极限,这种叉指换能器用普通光刻法即光投影复印和接触复印法制作。利用电掩模图象复制器,获得了0.50微米线宽的叉指换能器图案。利用光传递函数进行理论估计表明,叉指换能器的最小线宽可达0.5—0.4微米。叉指换能器光刻胶浮雕图案的扫描电子显微镜(SEM)照片说明,曝光时的驻波干涉会妨碍对图案形成的精确控制,但可以用反射率低的较薄的铝膜来消除。本文还讨论了铝膜叉指换能器对千兆赫SAW石英横向滤波器性能的影响,从实验扣理论上阐明了蒸发时叉指换能器导电铝膜最小厚度与基片温度参数的关系,叉指换能器指条的电阻越大,滤波器的插入损耗也越大,典型的结果是:基片温度为80℃时,为了使叉插换能器在千兆赫下正常工作,铝的金属化厚度需在20毫米以上。本文也讨论了铝膜叉指换能器与千兆赫SAW石英横向滤波器温度特性之间的关系。
This article describes the manufacturing authority and specific performance of a gigahertz SAW quartz transversal filter. First of all, the fabrication limitations of SAW superfine-to-ground AlGaAs transflectors on aluminum metallized quartz were studied. The interdigital transducers were fabricated using normal lithography, ie, optical projection copying and contact copying. An interdigital transducer pattern of 0.50 micron line width was obtained using an electric mask image replicator. The theoretical estimation using the optical transfer function shows that the minimum linewidth of the interdigital transducer can reach 0.5-0.4 μm. Scanning electron micrographs (SEM) of the interdigital transducer resist relief images illustrate that standing wave interference during exposure hinders the precise control of patterning but can be eliminated with thinner aluminum films with lower reflectivity. This paper also discusses the effect of aluminum film interdigital transducer on the performance of gigahertz SAW quartz transversal filter. The experimental deduction theoretically illustrates the relationship between the minimum thickness of conductive aluminum film and the substrate temperature parameter of the interdigital transducer. Interdigital transducer finger resistance, the greater the insertion loss of the filter, the typical result is: When the substrate temperature is 80 ℃, in order to fork the fork transducer in the work under the gigahertz, aluminum Metallization thickness of 20 mm or more. This paper also discusses the relationship between the aluminum film interdigital transducer and the temperature characteristics of a gigahertz SAW quartz transversal filter.