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本文简要介绍了用放射性核素的非单能初级辐射,非破坏地绝对测量极薄层厚度的X射线荧光测厚技术。测量薄层厚度的精确度好于1.1％。与空气等效法α测厚仪的测量结果对照,相对偏差小于3.8％。
This paper presents a brief introduction of X-ray fluorescence thickness measurement using non-monoenergetic primary radiation of radionuclides to absolutely measure the thickness of an extremely thin layer non-destructively. The accuracy of measuring the thickness of the sheet is better than 1.1%. Compared with the air equivalent method α thickness measurement results, the relative deviation is less than 3.8%.