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本文采用基于MEMS技术的梯形悬臂梁密度传感器分别在26~34℃和30~50℃范围内,对甲苯和0.65 cs二甲基硅油进行了密度实验研究.选用甲苯作为标准液对该传感器的工作参数进行标定,并测量了甲苯在26℃、30℃和34℃处的密度值.将甲苯的密度实验值与参考值进行比较,得到最大绝对偏差和平均绝对偏差分别为0.70%和0.43%.使用已标定的密度传感器对0.65 cs二甲基硅油进行密度测量,并将硅油的密度实验值与参考值进行比较,得到最大绝对偏差和平均绝对偏差分别为4.21%和4.16%,低于5%,满足工程上的需要.
In this paper, density of trapezoidal cantilever beam density sensor based on MEMS technology was used to conduct the density experiments of toluene and 0.65 cs dimethicone at 26 ~ 34 ℃ and 30 ~ 50 ℃, respectively.Using toluene as the standard solution to the sensor’s work Parameters were calibrated and the density of toluene at 26 ℃, 30 ℃ and 34 ℃ were measured.The maximum absolute deviation and average absolute deviation of toluene were 0.70% and 0.43% respectively by comparing the experimental value of toluene with the reference value. The densities of 0.65 cs dimethyl silicone oil were measured using a calibrated density sensor and the experimental data of the density of silicone oil were compared with the reference values to obtain the maximum absolute deviation and the average absolute deviation of 4.21% and 4.16%, respectively, below 5% , To meet the engineering needs.