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本文描述在3～5μm光谱范围内工作的凝视红外成象系统用的单片128×128元锑化铟阵列。制作阵列只需4次光刻,与先前的设计相比,其响应率提高5倍,在同样大小晶片的产量可增加14个。这种较高的灵敏度表明能大大改进热成象。
This paper describes a single 128 × 128 element indium antimonide array for use in gaze infrared imaging systems operating in the 3 to 5 μm spectral range. The fabrication array requires only four lithographs, providing a five-fold increase in response over the previous design, and an increase of 14 in the same-size wafer. This higher sensitivity indicates that thermography can be greatly improved.