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本文讨论了联邦标准209B关于洁净室空气洁净度分类的修订案之论据。该修订案是由环境科学学会第50委员会召开的一系列会议酝酿形成的。主要建议的变更是: 1.增加1级和10级; 2.两个新增加的级别,在适当调整所要求的浓度的情况下,可以以0.1、0.2、0.3和0.5μm粒径的粒子标定;而100级可以以0.2、0.3和0.5μm直径的粒子标定; 3.其他级(如50级)认为是合适的; 4.取样点数有不同的规定;流型特征以单向流和非单向流区分,而不是层流和紊流; 5.基于测量误差,规定了最小取样体积; 6.规定了初始和定期的检测; 7.检测要求粒子计数; 8.粒子计数器要求定期地校正; 9.如果同时有下列两种情况,则认为净化区域满足该级别范围,即:每个位置的平均粒子数满足该级别范围;这些平均粒子数的平均值大大低于该级别极限,即总平均值肯定会低于该级别极限(95％可信度)。下面讨论这些建议变更的理由和论据。
This article discusses the arguments of the Federal Standard 209B regarding the revision of cleanroom air cleanliness classifications. The amendment was formed by a series of meetings convened by the 50th Committee of the Environmental Science Society. The main proposed changes are: 1. Increase 1st and 10th; 2. Two newly added grades, which can be calibrated with particles of 0.1, 0.2, 0.3, and 0.5μm particle diameters with proper adjustment of the required concentration. ; And 100 can be calibrated with 0.2, 0.3 and 0.5μm diameter particles; 3. Other levels (such as 50) are considered appropriate; 4. There are different rules for the sampling points; flow pattern characteristics in one-way flow and non-single Distinguish flow, not laminar flow and turbulence; 5. Based on the measurement error, the minimum sampling volume is specified; 6. The initial and periodic detection is specified; 7. The detection requires particle counting; 8. The particle counter requires regular calibration; 9. If there are both of the following conditions, the purification area is considered to satisfy the level range, that is: the average number of particles in each position meets the level range; the average of these average number of particles is much lower than the level limit, ie the total average The value will certainly be below this level limit (95% confidence). The reasons and arguments for these proposed changes are discussed below.