金刚石薄膜是高新技术特种功能材料。目前国内、国际上对其制备方法、应用开发竞争激烈。金刚石薄膜的研制成功将为金刚石独特的光学、声学、电学、热学及机械性能的应用开拓广阔的前景。现已有多种化学气相法合成金刚石薄膜。直流弧光放电等离子体化学气相法合成金刚石薄膜具有生长速度快,结晶质量好的优点,因此该方法的开发应用具有重要的意义。 Diamond film is a high-tech special functional materials. At present, domestic and international competition for their preparation methods, application and development. The successful development of diamond films will open up broad prospects for the unique optical, acoustic, electrical, thermal and mechanical properties of diamond. There are a variety of chemical vapor synthetic diamond films. The DC arc discharge plasma CVD chemical synthesis of diamond thin films has the advantages of fast growth, good crystal quality, so the development and application of this method is of great significance.