制备了一种全部以聚合物为波导材料的电光调制器 ,其中芯层为新型可交联极化聚胺脂电光功能材料 .旋涂制备波导薄膜、电晕极化产生非线性、光刻和氧反应离子刻蚀完成脊波导为主要的工艺步骤。 1.3μm光源光纤耦合输入脊波导调制器 ,得到很好的输出端单模近场图及清晰的低频调制信号 A novel electro-optic modulator with all polymer-based waveguide materials was prepared, in which the core layer was a new type of cross-linkable polarizable polyamines electro-optic functional material. The waveguide films were spin-coated to produce a non-linear, corona- Oxygen reactive ion etching complete ridge waveguide as the main process steps. 1.3μm light source fiber-coupled input ridge waveguide modulator, get a good output single-mode near-field map and a clear low-frequency modulation signal