论文部分内容阅读
通过对国内IC生产线及其Stepper装备的现状、市场前景的分析,阐述了国内0.2～1μmIC生产线中二手Stepper解决方案。
Through the analysis of the current situation and market prospect of the domestic IC production line and its Stepper equipment, the used Stepper solution in the domestic 0.2 ~ 1μm IC production line is expounded.