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采用多弧离子镀技术和Ti-Al-Zr合金靶及Cr单质靶,在WC-8%Co硬质合金基体上制备了(Ti,Al,Zr)N/(Ti,Al,Zr,Cr)N和Cr N/(Ti,Al,Zr,Cr)N 2种四元双层氮化物膜。利用扫描电镜(SEM)、能谱仪(EDS)和X射线衍射仪(XRD)分析2种双层膜的微观组织、成分和结构;利用划痕仪和显微硬度计对比2种双层膜的力学性能。结果表明,获得的2种双层膜均具有B1-NaCl型的TiN面心立方结构;双层膜的组织均是典型的柱状晶结构;沉积偏压为–50~–200 V时,双层膜的力学性能均优于(Ti,Al,Zr,Cr)N单层膜,并与Ti-Al-Zr-Cr-N系梯度膜的力学性能相当,同时(Ti,Al,Zr)N/(Ti,Al,Zr,Cr)N双层膜可获得更高的硬度(HV_(0.01)最高值为41 GPa),而CrN/(Ti,Al,Zr,Cr)N双层膜可获得更强的膜层与基体间结合力(所有值均大于200 N)。
(Ti, Al, Zr) N / (Ti, Al, Zr and Cr) were prepared on a WC-8% Co cemented carbide substrate by using multi-arc ion plating technology and Ti-Al-Zr alloy target and Cr single- N and CrN / (Ti, Al, Zr, Cr) N2 quaternary double layer nitride films. The microstructure, composition and structure of the two bilayers were analyzed by scanning electron microscopy (SEM), energy dispersive spectrometer (EDS) and X-ray diffractometer (XRD). The scratch resistance and microhardness of two bilayers The mechanical properties. The results show that the obtained two kinds of bilayers have the TiN face-centered cubic structure of B1-NaCl type. The bilayers are all of typical columnar crystal structure. When the bias voltage is -50 ~ -200 V, The mechanical properties of the films are better than those of (Ti, Al, Zr, Cr) N monolayers and are comparable to the mechanical properties of Ti-Al-Zr- (Ti, Al, Zr, Cr) N bilayers can obtain higher hardness (HV_ (0.01) maximum is 41 GPa), while CrN / (Ti, Al, Zr, Cr) Strong film and substrate binding force (all values> 200 N).