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利用不同压强的氩气分别对铜靶(直径为14cm)和不锈钢靶(直径为30cm)进行了离子轰击清洗试验;测量了伏—安曲线,得出了清洗铜靶的最低电压为800伏,最大电流为54毫安,不锈钢靶的最低电压为500伏,最大电流为108毫安。
The ion bombardment cleaning test was carried out on copper target (diameter 14cm) and stainless steel target (diameter 30cm) by using different pressures of argon. The volt-ampere curve was measured and the minimum voltage for copper target cleaning was 800V. The maximum current is 54 mA, the minimum voltage of the stainless steel target is 500 V and the maximum current is 108 mA.