Microstructure evolution of processed Mg-Al-Zn alloy by equal channel angular extrusion(ECAE) in semi-solid isothermal treatment was investigated. The results show that with increasing semi-solid isothermal treatment temperature, the α phase solid grain size of processed Mg-Al-Zn alloy by ECAE increases firstly due to coarsening of α phase solid grains, then decreases due to melting of α phase solid grains. With the increase of extrusion passes during ECAE, the α phase solid grain size in the following semi-solid isothermal treatment decreases. The α phase solid grain size of processed Mg-Al-Zn alloy by ECAE under route BC is the smallest, while the α phase solid grain size of processed material by ECAE under route A is the largest. The primary mechanism of spheroid formation depends on the melting of recrystallizing boundaries and diffusion of solute atoms in the semi-solid state.