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详细描述了系统的构成。实验结果表明,所设计研制的光纤传感测量系统能很好地实现复杂轮廓表面形状的检测问题。测量系统的稳定性优于0.15％,高度分辨力优于0.4μm,定位测量的重复性达到±3μm,由于在传感头端部采用了自聚焦透镜技术,使该传感器有较高的横向分辨力,能有效地实现对微小复杂形状尺寸的扫描检测。将系统用于螺纹型面的检测,测量结果与用万能工具显微镜的检测结果比对,证明了本测量系统的实用性和方法的正确性。
Described in detail the composition of the system. The experimental results show that the designed optical fiber sensing and measuring system can well detect the complex contour surface shape. The stability of the measurement system is better than 0.15%, the resolution is better than 0.4μm, and the repeatability of positioning measurement is ± 3μm. Due to the self-focusing lens technology at the end of the sensor head, the sensor has high lateral resolution Force, can effectively achieve the small complex shape and size of the scan detection. The system is applied to the detection of the thread profiles. The comparison between the measurement results and the test results of the universal tool microscope proves the practicability and correctness of the measurement system.