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对TiN薄膜进行阳极氧化处理，在TiN表面形成了一层氧化膜。氧化膜呈干涉色，其颜色随槽压变化；氧化膜色调均匀、耐磨性较好。XPS及AES分析结果表明，氧化膜由TiO2组成，在槽压为9V时膜厚约90nm。
The TiN film was anodized to form an oxide film on the TiN surface. The oxide film is interference color, its color changes with the groove pressure; oxide film uniform color, better wear resistance. XPS and AES analysis results show that the oxide film is composed of TiO2 and the film thickness is about 90 nm when the groove pressure is 9V.